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METREX SCIENTIFIC INSTRUMENTS PVT. LTD.
GST : 07AAACM0005C1ZF

Chemical Vapour Deposition System (CVD)

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Dry Bath Incubator

Three Zone Split Tube Furnace (Cvd)

Three Zone Split Tube Furnace (Cvd) Specification

Feature
Three independently controlled temperature zones, rapid heating, computer connectivity, programmable temperature profiles, PID controller

Rating
High temperature range up to 1200°C

Condition
New

Type
Split Tube Furnace (CVD)

Usage
Laboratory, Research, Material Processing

Power
3.5 kW to 6 kW (depending on model)

Voltage
220V/240V, 50-60 Hz

Size
Tube diameter options: 50mm, 60mm, 80mm, 100mm (customizable)

Dimensions
Furnace length: approx. 900mm-1200mm (exterior)

Weight
56kg - 85kg (depending on model and tube size)

Application
Chemical Vapor Deposition, Thermal Treatment, Synthesis

Fuel Type
Electric

Capacity
Tube volume: 2L to 10L (depends on diameter and length)

Temperature Accuracy
1C with PID controller

Operating Humidity
<80% RH non-condensing

Heating Element
Kanthal or MoSi2 element type

Cooling
Rapid cooling with split tube design

Tube Material Compatibility
Quartz, Alumina, high-grade ceramics

Max Temperature
Up to 1200C (optionally 1500C available)

Control Interface
Digital display, programmable ramp/soak profiles

Atmosphere Control
Supports vacuum or controlled gas (inert, reducing, oxidizing)

Safety Features
Over-temperature protection, door interlock switch, emergency shutoff

Sensor Type
K-type/N-type/R-type thermocouples per zone

Sealing System
Gas-tight flanges for CVD processes

About Three Zone Split Tube Furnace (Cvd)

Three Zone Split Tube Furnace (Cvd)

Number of zone :One/Two /Three Zone (as per user requirement)
Heating temperature range : Upto1200 C/1400 C
Heating Element: A-1/Silicon Carbide
Temperature accuracy : +/-1 C
Furnace tube size : ID = 60 mm /OD =65mm/ length= 1200 mm
Quartz tube with couplers :High purity fused quartz
Size:ID =60mm, OD=65mm,length=1200mm

Flanges: Stainless steel 304 flanges on both ends, these are high vacuum flanges with double silicon O ring and metal ring. On one and provision for gas purging through valve and hinge door or ease of placing sample. At other end vacuum KF-25 connection for vacuum pump, KF-10 connection for vacuum gauge and release valve

Heating rate : 15 C per Minute (max.) or user settable Each Hot Zone length : 200 mm length
Display : 7 LCD Touch Screen HMI to control all vital operation of CVD i.e. temperature and gas flow. With Data logging of temperature and gas flow.
Construction : Horizontal and split type
Insulation : Vacuum formed Zirconia fiber
Shell Construction : MS body fabricated from 20/18 gauge sheet, powder coated for superior finish. Double layer body for low surface temp.
Temperature control : ( 1x16=16 segment) PID programmable Digital Temperature controller x 3 no. (separate for each zone)
Temperature sensor : 3 numbers (k type-1200 C/R type-1400 C)
Power control : Through the phase angle controlled SSRUnit/Thyristor Unit

Vacuum pump and gauge : In the range of 10-2 mbar by using Direct of Drive Rotary pump of capacity 200ltr/min with SS bellow andAnalogue Pirani Gauge Range 0.5 mbar to 10-3mbar with sensor having KF-10fitting. (Optional)

Gas purging arrangement

Digital vacuum gauge wih vacuum display upto 10-6 torr.
Gas mixing chamber : One unit kept between the Rotameters and the furnace
Furnace stand to height of 1 meter

Safety: Over current and short current protection,Thermocouple break down alarm, high temperature alarm.

OPTIONAL:-

Chiller with Circulation Pump
Gas Cylinder with Regulator
Mass flow controller for different gases, flow rate upto 500 sccm or as required with digital display (Optional)
Rotameter for different gases with needle valve.
Centrifuges ystems

Versatile Three-Zone Temperature Control

Each temperature zone in this split tube furnace is independently managed using state-of-the-art PID controllers and a digital interface. This design guarantees precise temperature regulation, with an accuracy of 1C, across the entire heating chamber, enabling complex thermal profiles and gradients tailored for Chemical Vapor Deposition, material synthesis, and advanced research projects.

Superior Construction and Material Compatibility

The furnace is built to accommodate a range of tube materials, including quartz, alumina, and high-grade ceramics, enabling high-temperature processes up to 1200C or 1500C. With gas-tight sealing, it supports various atmospheresvacuum, inert, reducing, or oxidizingsuitable for demanding scientific and industrial applications while ensuring energy efficiency and repeatable results.

Enhanced Safety and Smart Features

Safety is integral to this furnaces design, featuring over-temperature protection, a door interlock switch, and an emergency shutoff. Users benefit from rapid heating and cooling, programmable ramp/soak profiles, and computer connectivity for data logging and remote control. These smart features optimize workflow and ensure safe, streamlined operation in any laboratory setting.

FAQs of Three Zone Split Tube Furnace (Cvd):

Q: How does the three-zone temperature control system benefit my laboratory processes?

A: The three-zone temperature control enables precise management of temperature gradients across your samples. With each zone independently regulated by a PID controller, you can set custom ramp/soak profilesideal for Chemical Vapor Deposition, material synthesis, and advanced thermal treatments that require nuanced heating protocols.

Q: What materials are compatible with the furnace tubes and what applications does this support?

A: The furnace supports tubes made from quartz, alumina, and high-grade ceramics. This compatibility allows for a broad spectrum of applications, including chemical vapor deposition, thermal treatment, and synthesis, making it suitable for research institutions, industrial laboratories, and specialized manufacturing processes.

Q: When should I use vacuum or controlled gas atmospheres with this split tube furnace?

A: Use vacuum or controlled gas atmospheres when working with processes requiring a specific environment, such as preventing contamination or achieving unique material characteristics. The gas-tight flanges and programmable controls support inert, reducing, or oxidizing conditions for optimal material outcomes during CVD or synthesis.

Q: Where can I install or use the Three Zone Split Tube Furnace?

A: This furnace is designed for laboratory, research, and material processing settings. Its size, programmable features, and safety systems make it suitable for universities, research institutes, and industrial labs requiring high-temperature, controlled-environment processing.

Q: What safety measures are incorporated in the furnace design?

A: The furnace includes multiple safety features such as over-temperature protection, a door interlock switch to prevent accidental opening during operation, and an emergency shutoff mechanism. These ensure user protection and equipment reliability.

Q: How do I program temperature profiles and monitor the process?

A: You can set and monitor temperature profiles using the intuitive digital display interface. Programmable ramp/soak profiles, computer connectivity, and real-time readouts from K-type, N-type, or R-type thermocouples enable precise control and data logging throughout your experiment.

Q: What is the advantage of the split tube and rapid cooling system?

A: The split tube design allows easy access to samples and facilitates rapid cooling. This reduces downtime between experiments, enables quicker sample handling, and helps maintain sample integrity by minimizing unwanted thermal effects after processing.

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